Controlling of Depth of Dopant Diffusion Layer in a Material by Time Modulation of Diffusion Coefficient

In this paper as a development of recently introduced analytical approach for estimation of temporal characteristics of mass and heat transport we present analysis of diffusion depth of dopant in a material with time varying diffusion coefficient. It has been shown, that changing of time dependence of diffusion coefficient gives a possibility to accelerate or decelerate diffusion process. In this situation it is an actual question is control of diffusion depth during manufacturing p-n-junctions. The controlling gives a possibility to obtain required depth of the junctions, but not larger or smaller.